Vacuum Technology for Advanced IC Manufacturing

This course provides know-how and skills in handling vacuum systems and operating plasma equipment which are widely used in the wafer processing industry. It covers topics like high vacuum pumps, pressure gauges, vacuum materials and mass flow controllers. The operation and maintenance of vacuum system, plasma reactors and leak detection techniques will be covered through practical sessions.

Who should attend

Engineers, Engineering Technicians
Participants must have working experiences in high volume manufacturing in electronics setor.

For course details, click here.


Course Outline

Participants will learn about the nature of vacuum, identify various vacuum regions in relation to pressure, calculates the pressure of a vacuum system. They will also learn to classify various vacuum gauges in relation to vacuum region, describe the working principles of various vacuum gauges, compare and contrast between various vacuum gauges. There will also be practical training on zeroing and calibration of vacuum gauges, pumping and venting of vacuum system, checking of vacuum integrity with time constant and partial pressure test.

Participants will also learn about the operating principles of various vacuum pumps, compare and contrast between them and demonstration of turbo molecular pump. They will also learn the operating principles of mass flow controller, installation and configuration of mass flow controller and demonstration of PID pressure control. There will also be practical training on Mass flow controller flow rate verification using the pressure rate of rise technique, checking of gross and fine leaks with helium leak detector.


Participants will be issued with a Certificate of Accomplishment upon meeting 75% of the required course attendance.

Trainers' Profile

Enquiries & Application

Submit on-line application via: (please select course code: ZIP)

Temasek SkillsFuture Academy
Temasek Polytechnic
East Wing Block 1A, Level 3, Unit 81
21 Tampines Avenue 1
Singapore 529757

Opening Hours
8.30 am to 7.00 pm (Mon to Fri)
Closed on Sat, Sun & Public Holidays

Contact Details
 6788 1212

Temasek Polytechnic reserves the right to alter the course, modify the scale of fee, amend any other information or cancel course with low enrolment.