Jump to Section

Course Overview

This course provides know-how and skills in handling vacuum systems and operating plasma equipment. These complex machines are widely used in advanced manufacturing of integrated circuits. The course covers topics such as high vacuum pumps, pressure gauges, vacuum materials, leak detection, plasma physics and high density plasma technologies. The operation and maintenance of vacuum systems, plasma reactors and leak detection techniques will be covered through practical sessions.

Application/Entry Requirement

Participants must have working experience in high volume manufacturing in electronics sector.

Who Should Attend

Engineers, Engineering Technicians

What You'll Learn

Participants will learn about the nature of vacuum, identify various vacuum regions in relation to pressure, calculates the pressure of a vacuum system. They will also learn to classify various vacuum gauges in relation to vacuum region, describe the working principles of various vacuum gauges, compare and contrast between various vacuum gauges. There will also be practical training on zeroing and calibration of vacuum gauges, pumping and venting of vacuum system, checking of vacuum integrity with time constant and partial pressure test.


Participants will also learn about the operating principles of various vacuum pumps, compare and contrast between them and demonstration of turbo molecular pump. They will also learn the operating principles of mass flow controller, installation and configuration of mass flow controller and demonstration of PID pressure control. There will also be practical training on Mass flow controller flow rate verification using the pressure rate of rise technique, checking of gross and fine leaks with helium leak detector.





There will be an assessment at the end of the course and participants will be awarded with a Certificate of Performance upon attempting the assessment and upon meeting 75% of the required course attendance.

Course Schedule

Intake Info Application Closing Date Course Duration

To be advised


2 days

(9 AM – 5 PM)


Registration may be closed earlier due to overwhelming response.


Application Procedures


Click on the Apply button above to submit your application online. Registration may be closed earlier due to overwhelming responses.


Steps to follow in your application:


Step 1 - Enter NRIC/ Passport No.

Step 2 - Select ZIP and course commencement date.

Step 3 - Enter personal, qualification, employment and sponsoring details (if applicable).

Step 4 - Applicable for 'Stackable based modular course' or 'Diploma or Post-Diploma courses' only. Select, rank your preference for the selected subject(s) and indicate the number of subject(s) you wish to take. Please note that the subject start date(s) denotes the semester start date.

Step 5: Make declaration and submit online application.

Course Fees

Fee Type Item Course Fees
(w GST) 
Full Course Fee S$481.50
Singapore Citizen & PR age below 40 years old  S$144.45
Singapore Citizen aged 40 & above/SME-Company sponsored Singapore Citizen & PR S$54.45

SkillsFuture Credit Approved. For more details, please click here


With effect from 1 Jul 2020, the Workforce Training Scheme (WTS) will be replaced by Work Support Scheme (WSS), for more information, please visit: 


Lecturer/Trainer Profile

You May Also Be Interested In

Course Contact

  • 67881212
  • 8.30am – 6.00pm (Mon – Thu)

    8.30am – 5.30pm (Fri)

    Closed on Sat, Sun & Public Holidays

    Due to Safe Management Measures, our office is currently closed.

    Please call or email us your enquiry.

    Thank you for your patience and understanding.

  • Website: https://www.tp.edu.sg/tsa
  • Temasek SkillsFuture Academy
    Temasek Polytechnic
    East Wing Block 1A,
    Level 3, Unit 81
    21 Tampines Ave 1
    Singapore 529757


  • Temasek Polytechnic reserves the right to alter the course, modify the scale of fee, amend any other information or cancel a course with low enrolment.

Ask TP